International Commercialization of Micro-nano Systems (COMS) Conference
Pages
493–499
BibTeX Entry
@inproceedings{jandric_mems05, author = {Z Jandric and R Saini and J Gammell and D Tuggle and G Skidmore}, title = {Scanning electron microscopy - next generation}, booktitle = {Proceedings of the International Commercialization of Micro-nano Systems ({COMS}) Conference}, year = {2005}, pages = {493--499}, month = aug, }