Jump to Content
  1. Oxford
  2. MPLS
  3. Eng. Sci.
  4. ORI

Estimation, Search, and Planning (ESP) Research Group

Scanning electron microscopy - next generation

Authors
  1. Z. Jandric
  2. R. Saini
  3. J. Gammell
  4. D. Tuggle
  5. G. Skidmore
Publication Date
Publication Details
Type
Abstract-Refereed Conference Paper
Conference
International Commercialization of Micro-nano Systems (COMS) Conference
Pages
493–499
BibTeX Entry
@inproceedings{jandric_mems05,
author = {Z Jandric and R Saini and J Gammell and D Tuggle and G Skidmore},
title = {Scanning electron microscopy - next generation},
booktitle = {Proceedings of the International Commercialization of Micro-nano Systems ({COMS}) Conference},
year = {2005},
pages = {493--499},
month = aug,
}