Manufacturable MEMS miniSEMs
Share
- Publication Date
- Abstract
We present here the latest results of our manufacturable miniature scanning electron microscope (miniSEM) development effort that incorporates a micro-electro-mechanical-systems (MEMS) electrostatic microcolumn and a carbon nanotube (CNT) emitter. The micro-column is designed for a beam diameter of 10–20 nm at the sample with beam energy of 1 keV at currents of up to 1 nA and a 100 μm field of view (FOV). The microcolumn components are fabricated on a single 50 μm thick silicon on insulator (SOI) wafer and are assembled to the pre-fabricated, self-aligning sockets to realize an inexpensive and compact microcolumn. A new MEMS process presented here allows the microcolumn electrodes to withstand voltages in excess of ±1 kV which is the maximum design voltage for any electrode. We also present measured electron optic characteristics of an Einzel lens and an octupole deflector along with simulations. The operational testing of the entire microcolumn is currently in progress.
- Publication Details
- Type
- Journal Paper
- Journal
- Microelectronic Engineering
- Volume
- 83
- Number
- 4
- Pages
- 1376–1381
- Digital Object Identifier
- 10.1016/J.MEE.2006.01.260
- Manuscript
- Google Scholar
- Google Scholar
- BibTeX Entry
@article{saini_mee06,
author = {R Saini and Z Jandric and J Gammell and S A M Mentink and D Tuggle},
title = {Manufacturable {MEMS} {miniSEMs}},
journal = {Microelectronic Engineering},
year = {2006},
volume = {83},
number = {4},
pages = {1376--1381},
doi = {10.1016/J.MEE.2006.01.260},
}