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Estimation, Search, and Planning (ESP) Research Group

Manufacturable MEMS miniSEMs

Authors
  1. R. Saini
  2. Z. Jandric
  3. J. Gammell
  4. S. A. M. Mentink
  5. D. Tuggle
Publication Date
Abstract

We present here the latest results of our manufacturable miniature scanning electron microscope (miniSEM) development effort that incorporates a micro-electro-mechanical-systems (MEMS) electrostatic microcolumn and a carbon nanotube (CNT) emitter. The micro-column is designed for a beam diameter of 10–20 nm at the sample with beam energy of 1 keV at currents of up to 1 nA and a 100 um field of view (FOV). The microcolumn components are fabricated on a single 50 um thick silicon on insulator (SOI) wafer and are assembled to the pre-fabricated, self-aligning sockets to realize an inexpensive and compact microcolumn. A new MEMS process presented here allows the microcolumn electrodes to withstand voltages in excess of +/-1 kV which is the maximum design voltage for any electrode. We also present measured electron optic characteristics of an Einzel lens and an octupole deflector along with simulations. The operational testing of the entire microcolumn is currently in progress.

Publication Details
Type
Journal Paper
Journal
Microelectronic Engineering
Volume
83
Number
4
Pages
1376–1381
Digital Object Identifier DOI
10.1016/J.MEE.2006.01.260
Manuscript
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BibTeX Entry
@article{saini_mee06,
author = {R Saini and Z Jandric and J Gammell and S A M Mentink and D Tuggle},
title = {Manufacturable {MEMS} {miniSEMs}},
journal = {Microelectronic Engineering},
year = {2006},
volume = {83},
number = {4},
pages = {1376--1381},
doi = {10.1016/J.MEE.2006.01.260},
}