International Conference on Micro and Nano-Engineering
Pages
734–735
BibTeX Entry
@inproceedings{saini_mne05, author = {R Saini and Z Jandric and J Gammell and C Baur and S A Mentink and D Tuggle}, title = {Manufacturable {MEMS} {miniSEMs}}, booktitle = {International Conference on Micro and Nano-Engineering}, year = {2005}, pages = {734--735}, month = sep, }