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Estimation, Search, and Planning (ESP) Research Group

Manufacturable MEMS miniSEMs

Authors
  1. R. Saini
  2. Z. Jandric
  3. J. Gammell
  4. C. Baur
  5. S. A. Mentink
  6. D. Tuggle
Publication Date
Publication Details
Type
Abstract-Refereed Conference Paper
Conference
International Conference on Micro- and Nano-engineering
Pages
734–735
BibTeX Entry
@inproceedings{saini_mne05,
author = {R Saini and Z Jandric and J Gammell and C Baur and S A Mentink and D Tuggle},
title = {Manufacturable {MEMS} {miniSEMs}},
booktitle = {International Conference on Micro- and Nano-engineering},
year = {2005},
pages = {734--735},
month = sep,
}